Products - Tescan - Field Emission Scanning Electron Microscope (FE-SEM)

Field Emission Scanning Electron Microscope (FE-SEM)

TESCAN is proud to introduce the new MIRA family of high performance microscope equipped with a Schottky Field Emission electron gun. Tescan FE-SEM, MIRA Model, has a resolution of <2 nm and magnification from 13 x to 1,000,000 x. All microscope functions are controlled by means of PC via the MiraTC program using Windows™ platforms. Probe Current and Spot Size continuously adjustable by unique In-Flight Beam Tracing™, Vacuum control, Objective Alignment, Gun Alignment, Compensation for kV, Probe Current optimised for Spot Size, Spot Size optimised for Magnification, Scanning Speed, Contrast & Brightness, Focus & Stigmator, Look up Table, all have automatic control.

Important features:

• High brightness Schottky emitter for high-resolution / high-current / low-noise imaging.
• Unique three-lens Wide Field Optics™ design offering the variety of working and displaying modes embodying the Tescan proprietary Intermediate Lens for the beam aperture optimisation.
• Real time In-Flight Beam Tracing™ for the performance and spot optimisation integrating the well established software Electron Optical Design.
• Fast imaging rate.
• High-throughput large–area automation, e.g. automated particle location and analyses.
• Extraordinary analytical potential – 11 chamber ports with optimised analytical geometry allowing simultaneous EDS, WDS and EBSD
• Fully automated microscope set-up including electron optics set-up and alignment.
• Sophisticated software for SEM control, image acquisition, archiving, processing and analysis.
• Network operations and built-in remote access/diagnostics, all come as the Tescan standard.

Two types of column are offered:

MIRA LMH – conventional model operating at a high vacuum of approximately < 1 x 10-2 Pa

MIRA LMU – variable pressure microscope modification, which extended facility for low vacuum operation. In low vacuum mode, non conductive specimens can be examined in their natural, uncoated state, using all working modes of the optical system at pressures between 7 – 150 Pa.

SEM Accessories and configuration that can be attached:

• Low Vacuum Secondary Tescan Detector (LVSTD)
• Transmitted Electron (TE) detector
• Electron Beam Induced Current (EBIC)
• Engery Dispersive X-ray Fluorescence Spectrometer (EDX)
• Wavelength Dispersive X-ray Fluorescence Spectrometer (WDX)
• Electron Back-Scattered Diffraction (EBSD)
• CL Detector
• Probe current measurement
• Chamber view camera
• Touch Alarm
• Cooling stage with Peltier Couple

Some Application Picture